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AS500DMTXB离子镀膜机设备照片4G-CAE电弧工作状态GIMS工作状态

AS500

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Scientific
Mold
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Cutting...
  • AS500DMTXB离子镀膜机设备照片
  • 4G-CAE电弧工作状态
  • GIMS工作状态
  • Detail
AS500 is a full-automatic, experimental (small) and multi-functional PVD hard coating equipment specially designed for scientific research institutes, whose technical specifications are listed as follows:

Vacuum chamber dimensions Ø760mm * H700mm
Uniform platable area Ø500mm * H300mm
Final vacuum 3.0*10-4Pa
Pressure rising rate 0.33Pa/hr(normality)
Cooling water 5ton/hr
Occupied space 4.0*3.0*3.5m3
Vacuum chamber 304 stainless steel of Japan and Korea, double layers and five-year warranty
Pumping system Edwards/Leybold magnetic molecular pump + Leybold roughing pump
Vacuum testing Inficond diaphragm gauge+SKY90 compound vacuum gauge
Traffic control Sevenstar Electronics’ 7S-CS200 digital flowmeter/Brooks/MKS/AE
Swivel removable down swivel (4 axis)
Cathodic arc 2 groups(4 sets) of 4G-CAE (target material specification 100*20) at most
Magnetron sputtering 2 groups(4 sets) of column or plane at most
Gas ion source 1 set of anode laminar gas ion source
Grid bias power supply AE Pinnacle Plus 10KW/ Huettinger 18KW
Smart source baffle 1 set, prerinsing the target material before coating
Heating system 500 degrees at most, 3 thermocouples for supervision
Cooling water circulation system equipped with Japanese SMC water switch, intelligent control.
Electrical element air switch and contactor switch of Japanese Omron PLC, JST, Schneider, etc.

Optional configurations are as followed:
 
1. HIPIMS High Energy Pulse Magnetron Sputtering System
2. Independent public rotating swivel structure
3. Ultrahigh vacuum furnace 5.0* 10-5Pa
4. Gencoa: Speedflo system
5. Standard fixture
6. Accessory equipment such as special workpiece oven, water chiller and sand-blasting machine

ProChina vacuum coating machine equipments are designed and manufactured strictly under standard and specification of CE of the EU.
 
Request Quotes and Solutionssupport@prochina.com.cn

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