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AS600工具镀膜设备

DLC coating equipment

我公司的DLC类金刚石膜的制备方式采用阳极层流性气体离子源结合非平衡磁控溅射的方法,来获得纳米多层结构的MeC/DLC膜、纳米复合结构的Me-DLC膜或单(多)元素掺杂的类金刚石膜...
  • AS600工具镀膜设备
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DLC diamond-like coating produced by GIS ion source technology.

At present, there are many preparation methods of DLC diamond-like film, such as ion beam assisted deposition, magnetron sputtering, vacuum cathode arc deposition, plasma enhanced chemical vapor deposition, ion implantation method, etc. Our company produces DLC diamond-like film through anode laminar gas ion source combined with unbalanced magnetron sputtering method, to obtain MeC/DLC coating of multiple layers of nano structure, Me-DLC coating of nano composite structure or diamond-like coating of single (multiple) element.

Equipments used by our company to prepare DLC diamond-like film are mainly AS600 and AS500.

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