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AS600 is a model that satisfies both the multifunctional of scientific research and the mass production requirements, specifications are listed as follows:
| Vacuum chamber dimensions | Ø1000mm * H1000mm |
| Uniform platable area | Ø600mm * H600mm |
| Final vacuum | 3.0*10-4Pa |
| Pressure rising rate | 0.33Pa/hr（normality） |
| Cooling water | 6ton/hr |
| Occupied space | 4.5*4.0*3.5m3 |
| Vacuum chamber | 304 stainless steel of Japan and Korea, double layers and five-year warranty |
| Pumping system | KYKY Molecular pump/Edwards/Leybold magnetic molecular pump+Leyboldroughing pump+Roots pump |
| Vacuum testing | Inficond diaphragm gauge+SKY90 compound vacuum gauge |
| Traffic control | Sevenstar Electronics’ 7S-CS200 digital flowmeter/Brooks/MKS/AE |
| Swivel | removable down swivel (4, 5, 6, 8 axis, Choose one) |
| Cathodic arc | 3 groups(9 sets) of 4G-CAE (target material specification 100*20) at most |
| Magnetron sputtering | 3 groups(6 sets) of column or plane at most |
| Gas ion source | 1 set of anode laminar gas ion source |
| Grid bias power supply | AE Pinnacle Plus 10KW/ Huettinger 18KW |
| Smart source baffle | 1 set, prerinsing the target material before coating. |
| Heating system | 500 degrees at most, 3 thermocouples for supervision |
| Cooling water circulation system | equipped with Japanese SMC water switch, intelligent control. |
| Electrical element | air switch and contactor switch of Japanese Omron PLC, JST, Schneider, etc. |
Optional configurations are as followed:
1. HIPIMS High Energy Pulse Magnetron Sputtering System
2. Independent public rotating swivel structure
3. Ultrahigh vacuum furnace 5.0* 10-5Pa
4. Gencoa: Speedflo system
5. Standard fixture
6. Accessory equipment such as special workpiece oven, water chiller and sand-blasting machine
2. Independent public rotating swivel structure
3. Ultrahigh vacuum furnace 5.0* 10-5Pa
4. Gencoa: Speedflo system
5. Standard fixture
6. Accessory equipment such as special workpiece oven, water chiller and sand-blasting machine
ProChina vacuum coating machine equipments are designed and manufactured strictly under standard and specification of CE of the EU.
Request Quotes and Solutions：huzhongjun@naura.com
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