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AS600DMTX型多功能离子真空镀膜机镀膜机下转架推车AS600DMTX俯视照片

AS600

Solutions:
Scientific
Mold
Key component...
  • AS600DMTX型多功能离子真空镀膜机
  • 镀膜机下转架推车
  • AS600DMTX俯视照片
  • Detail
AS600 is a model that satisfies both the multifunctional of scientific research and the mass production requirements, specifications are listed as follows:

Vacuum chamber dimensions Ø1000mm * H1000mm
Uniform platable area Ø600mm * H600mm
Final vacuum 3.0*10-4Pa
Pressure rising rate 0.33Pa/hr(normality)
Cooling water 6ton/hr
Occupied space 4.5*4.0*3.5m3
Vacuum chamber 304 stainless steel of Japan and Korea, double layers and five-year warranty
Pumping system KYKY Molecular pump/Edwards/Leybold magnetic molecular pump+Leyboldroughing pump+Roots pump
Vacuum testing Inficond diaphragm gauge+SKY90 compound vacuum gauge
Traffic control Sevenstar Electronics’ 7S-CS200 digital flowmeter/Brooks/MKS/AE
Swivel removable down swivel (4, 5, 6, 8 axis, Choose one)
Cathodic arc 3 groups(9 sets) of 4G-CAE (target material specification 100*20) at most
Magnetron sputtering 3 groups(6 sets) of column or plane at most
Gas ion source 1 set of anode laminar gas ion source
Grid bias power supply AE Pinnacle Plus 10KW/ Huettinger 18KW
Smart source baffle 1 set, prerinsing the target material before coating.
Heating system 500 degrees at most, 3 thermocouples for supervision
Cooling water circulation system equipped with Japanese SMC water switch, intelligent control.
Electrical element air switch and contactor switch of Japanese Omron PLC, JST, Schneider, etc.

Optional configurations are as followed:
 
1. HIPIMS High Energy Pulse Magnetron Sputtering System
2. Independent public rotating swivel structure
3. Ultrahigh vacuum furnace 5.0* 10-5Pa
4. Gencoa: Speedflo system
5. Standard fixture
6. Accessory equipment such as special workpiece oven, water chiller and sand-blasting machine

ProChina vacuum coating machine equipments are designed and manufactured strictly under standard and specification of CE of the EU.
 
Request Quotes and Solutions:support@prochina.com.cn

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