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AS700 is developed for coating service and tools companies. It's a simple structure and large load. Specific as follows:
Vacuum chamber dimensions | Ø900mm * H1200mm |
Uniform platable area | Ø700mm * H800mm |
Ultimate vacuum | 3.0*10-4Pa |
Pressure rising rate | 0.33Pa/hr(normality) |
Cooling water | 6ton/hr |
Occupied space | 4.5*4.0*3.5m3 |
Vacuum chamber | 304 stainless steel of Japan and Korea, double layers and five-year warranty |
Pumping system | KYKY Molecular pump/Edwards/Leybold magnetic molecular pump+Leyboldroughing pump+Roots pump |
Vacuum testing | Inficond diaphragm gauge+SKY90 compound vacuum gauge |
Traffic control | Sevenstar Electronics’ 7S-CS200 digital flowmeter/Brooks/MKS/AE |
Swivel | removable down swivel (4, 5, 6, 8, 9, 12 axis, Choose one) |
Cathodic arc | 4 groups(16 sets) of 4G-CAE (target material specification 100*20) at most |
Grid bias power supply | Huettinger Bias 26KW/PLS-30KW |
Smart source baffle | 1 set, prerinsing the target material before coating. |
Heating system | 500 degrees at most, 3 thermocouples for supervision |
Cooling water circulation system | equipped with Japanese SMC water switch, intelligent control. |
Electrical element | air switch and contactor switch of Japanese Omron PLC, JST, Schneider, etc. |
Optional configurations are as followed:
1、Standard fixture
2、Accessory equipment such as special workpiece oven, water chiller and sand-blasting machine
Request Quotes and Solutions:huzhongjun@naura.com
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