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AS710 离子镀膜机左前视图AS710 前视图AS710 左侧视图

AS710

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  • AS710 离子镀膜机左前视图
  • AS710 前视图
  • AS710 左侧视图
  • Detail
AS710 真空离子镀膜机价格
AS710技术规格:

● Workpiece swivel system: The type whose guide rail can be removed; the type whose workpiece swivel are installed at bottom; the type with liftable hydraulic ram. Multiple structures are optional (1/4/6/8/9/12 axis).
● Air vacuum system: roughing pump(with dust filter) + roots pump + molecular pump +backing pump
● Process gas intake system: 4 routes of digital control MFC
● Vacuum detection system: composite vacuum gage + diaphragm vacuum gauge
● Grid bias power supply: direct current(pulse) 30KW (water-cooling)
● Baffle system: one set of smart source baffle 
● Electric arc ionization source: 16 sets (4 rows) of 4G-CAE at most
● GISETCH module: a set (GIS+AE Pinnacle Plus+ 10KWdriving power source)
● Control system: IPC+PLC full automatic control 
● Heating module: 550℃, 39.6KW
● Power supply requirement: 100KVA, 380-400V, 50-60Hz
● Cooling water requirement: 6.0 ton/hr, Δ2.5kg/cm2, 20-25℃
● Vacuum chamber dimensions:φ 900mm x H1200mm
● Uniform platable area:φ 650mm x H800mm

   
 Swivel cart Fixture loading

 
   
 Manual operation Main control
   
 Sample-hobs Sample-millings

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