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AS710技术规格：
● Workpiece swivel system: The type whose guide rail can be removed; the type whose workpiece swivel are installed at bottom; the type with liftable hydraulic ram. Multiple structures are optional (1/4/6/8/9/12 axis).
● Air vacuum system: roughing pump(with dust filter) + roots pump + molecular pump +backing pump
● Process gas intake system: 4 routes of digital control MFC
● Vacuum detection system: composite vacuum gage + diaphragm vacuum gauge
● Grid bias power supply: direct current(pulse) 30KW (water-cooling)
● Baffle system: one set of smart source baffle
● Electric arc ionization source: 16 sets (4 rows) of 4G-CAE at most
● GISETCH module: a set (GIS+AE Pinnacle Plus+ 10KWdriving power source)
● Control system: IPC+PLC full automatic control
● Heating module: 550℃, 39.6KW
● Power supply requirement: 100KVA, 380-400V, 50-60Hz
● Cooling water requirement: 6.0 ton/hr, Δ2.5kg/cm2, 20-25℃
● Vacuum chamber dimensions：φ 900mm x H1200mm
● Uniform platable area：φ 650mm x H800mm
● Vacuum chamber dimensions：φ 900mm x H1200mm
● Uniform platable area：φ 650mm x H800mm
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| Swivel cart | Fixture loading |
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| Manual operation | Main control |
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| Sample-hobs | Sample-millings |
Request Quotes and Solutions：huzhongjun@naura.com
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